Including substrate temperature in berg model FOR reactive...

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Thin Solid Films 2019 / 12

Including substrate temperature in berg model FOR reactive sputtering

Karnopp, Júlia, Sagás, Julio César
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Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2019.137761
Date:
December, 2019
File:
PDF, 1.17 MB
2019
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