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A Compound Control Based on the Piezo-Actuated Stage with Bouc–Wen Model
Fang, Jiwen, Wang, Jia, Li, Chong, Zhong, Wei, Long, ZhiliVolume:
10
Journal:
Micromachines
DOI:
10.3390/mi10120861
Date:
December, 2019
File:
PDF, 3.94 MB
2019