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[IEEE 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) - Helsinki, Finland (2019.7.1-2019.7.5)] 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) - A Five-Axis Monolithic Nanopositioning Stage Constructed from a Bimorph Piezoelectric Sheet
Omidbeike, Meysam, Yong, Yuen K., Moore, Steven I., Fleming, Andrew J.Year:
2019
DOI:
10.1109/marss.2019.8860940
File:
PDF, 1006 KB
2019