[IEEE 2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Kyoto, Japan (2019.7.2-2019.7.5)] 2019 26th International Workshop on Active-Matrix Flatpanel Displays and Devices (AM-FPD) - Atomic hydrogen annealing of AlO x /GeO x /a-Ge stack structure fabricated in oxygen atmosphere
Onuki, Tomofumi, Heya, Akira, Matsuo, NaotoYear:
2019
DOI:
10.23919/AM-FPD.2019.8830620
File:
PDF, 1.39 MB
2019