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Modeling and calculation of slurry-chemistry effects on chemical–mechanical planarization with a grooved pad
Yao-Chen Wang, Tian-Shiang YangVolume:
63
Language:
english
Pages:
18
DOI:
10.1007/s10665-008-9240-4
Date:
January, 2009
File:
PDF, 664 KB
english, 2009