Comprehensive and systematic design of metal/high-k gate stack for high-performance and highly reliable SiC power MOSFET
Hosoi, Takuji, Azumo, Shuji, Kashiwagi, Yusaku, Hosaka, Shigetoshi, Yamamoto, Kenji, Aketa, Masatoshi, Asahara, Hirokazu, Nakamura, Takashi, KIMOTO, Tsunenobu, SHIMURA, Takayoshi, WATANABE, HeijiJournal:
Japanese Journal of Applied Physics
DOI:
10.7567/1347-4065/ab65a3
Date:
December, 2019
File:
PDF, 1.28 MB
2019