Effect of silicon oxide coating on a silicon nitride focusing grating coupler efficiency
Prokhodtsov, Alexey, Golikov, Alexander, An, Pavel, Kovalyuk, Vadim, Goltsman, Gregory, Arakelyan, S., Evlyukhin, A., Kalachev, A., Naumov, A.Volume:
220
Year:
2019
Journal:
EPJ Web of Conferences
DOI:
10.1051/epjconf/201922002009
File:
PDF, 290 KB
2019