Relationship between electrical properties and interface...

AIP Advances 2019 / 10 Vol. 9; Iss. 10

Relationship between electrical properties and interface structures of SiO 2 /4H-SiC prepared by dry and wet oxidation

Indari, Efi Dwi, Yamashita, Yoshiyuki, Hasunuma, Ryu, Oji, Hiroshi, Yamabe, Kikuo
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Volume:
9
Journal:
AIP Advances
DOI:
10.1063/1.5126050
Date:
October, 2019
File:
PDF, 2.66 MB
2019
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