[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY -...

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[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Development of a metrology method for composition and thickness of barium strontium titanate thin films

Remmel, Thomas, Werho, Dennis, Liu, Ran, Chu, Peir
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Year:
1998
DOI:
10.1063/1.56900
File:
PDF, 748 KB
1998
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