[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Development of a metrology method for composition and thickness of barium strontium titanate thin films
Remmel, Thomas, Werho, Dennis, Liu, Ran, Chu, PeirYear:
1998
DOI:
10.1063/1.56900
File:
PDF, 748 KB
1998