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[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Dopant characterization round-robin study performed on two-dimensional test structures fabricated at Texas Instruments
Ukraintsev, Vladimir A., List, R. Scott, Chang, Mi-Chang, Edwards, Hal, Machala, Charles F., Martin, Richard San, Zavyalov, Vladimir, McMurray, Jeff S., Williams, Clayton C., De Wolf, Peter, VandervorYear:
1998
DOI:
10.1063/1.56919
File:
PDF, 752 KB
1998