[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY -...

  • Main
  • [ASCE CHARACTERIZATION AND METROLOGY...

[ASCE CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY - Gaithersburg, Maryland (USA) (23-27 March 1998)] The 1998 international conference on characterization and metrology for ULSI technology - Dopant characterization round-robin study performed on two-dimensional test structures fabricated at Texas Instruments

Ukraintsev, Vladimir A., List, R. Scott, Chang, Mi-Chang, Edwards, Hal, Machala, Charles F., Martin, Richard San, Zavyalov, Vladimir, McMurray, Jeff S., Williams, Clayton C., De Wolf, Peter, Vandervor
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Year:
1998
DOI:
10.1063/1.56919
File:
PDF, 752 KB
1998
Conversion to is in progress
Conversion to is failed