High-quality Ge-rich SiGe thin films epitaxially grown on Si at low temperature by a two-step approach
Tao, Ke, Wang, Jin, Jiang, Shuai, Jia, Rui, Jin, Zhi, Liu, XinyuVolume:
21
Year:
2019
Journal:
CrystEngComm
DOI:
10.1039/c9ce00948e
File:
PDF, 3.38 MB
2019