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ChemInform Abstract: Decomposition of Silane in Plasma Deposition Reactors
DEJOSEPH, C. A. JUN., HAALAND, P. D., GARSCADDEN, A.Volume:
17
Journal:
Chemischer Informationsdienst
DOI:
10.1002/chin.198634364
Date:
August, 1986
File:
PDF, 96 KB
1986