Effect of frequency and pulse-on time of high power impulse magnetron sputtering on deposition rate and morphology of titanium nitride using response surface methodology
GHASEMI, Saeed, FARHADIZADEH, Ali Reza, GHOMI, HamidVolume:
29
Journal:
Transactions of Nonferrous Metals Society of China
DOI:
10.1016/S1003-6326(19)65165-4
Date:
December, 2019
File:
PDF, 5.87 MB
2019