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[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - The Effect of Amorphization Conditions on the Measured Activation of Source Drain Extension Implants
England, Jonathan, Kontos, Alexander, Renau, Anthony, Gwilliam, Russell, Smith, Andrew, Knights, Andrew, Jain, Amitabh, Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
DOI:
10.1063/1.3033691
File:
PDF, 1.37 MB
2008