[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo...

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[ASCE STRESS INDUCED PHENOMENA IN METALLIZATION - Tokyo (Japan) (4-6 Jun 1997)] Fourth international workshop on stress induced phenomena in metallization - In-situ TEM-investigations of mass transport in “near-bamboo” Al-interconnects due to electromigration

Heinen, Dirk, Schroeder, Herbert, Schilling, Werner
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Year:
1998
DOI:
10.1063/1.54641
File:
PDF, 990 KB
1998
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