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Comparison of plasma parameters and optical emission in DC, HIPIMS and hybrid DC+HIPIMS modes of magnetron sputtering
Semenov, V A, Grenadyorov, A S, Oskirko, V O, Zakharov, A N, Rabotkin, S V, Ionov, I V, Solovyev, A AVolume:
1393
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/1393/1/012023
Date:
November, 2019
File:
PDF, 1.02 MB
2019