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[IEEE 2019 IEEE International Ultrasonics Symposium (IUS) - Glasgow, United Kingdom (2019.10.6-2019.10.9)] 2019 IEEE International Ultrasonics Symposium (IUS) - Magnetron Deposition of AlN and ScAlN for Mass-production for BAW Devices and MEMS
Mishin, Sergey, Oshmyansky, YuryYear:
2019
DOI:
10.1109/ULTSYM.2019.8925969
File:
PDF, 253 KB
2019