[IEEE 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) - Helsinki, Finland (2019.7.1-2019.7.5)] 2019 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) - Calibration of a class of 3 DOF serial micro robotic systems through SEM vision: application to vertical AFM tip landing

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