All-oxide thin-film transistors with channels of mixed...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2019 / 12 Vol. 37; Iss. 6

All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition process

Lee, Jeong-Mu, Lee, Hwan-Jae, Pi, Jae-Eun, Yang, Jong-Heon, Lee, Jeong Hun, Ahn, Seong-Deok, Kang, Seung-Youl, Moon, Jaehyun
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Volume:
37
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5119937
Date:
December, 2019
File:
PDF, 1.89 MB
2019
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