Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2020 / 01 Vol. 38; Iss. 1
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Ion bombardment induced formation of self-organized wafer-scale GaInP nanopillar assemblies
Visser, Dennis, Jaramillo-Fernandez, Juliana, Haddad, Gabriel, Sotomayor Torres, Clivia M., Anand, SrinivasanVolume:
38
Journal:
Journal of Vacuum Science & Technology B
DOI:
10.1116/1.5127265
Date:
January, 2020
File:
PDF, 2.87 MB
2020