In vacuo studies on plasma-enhanced atomic...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2020 / 01 Vol. 38; Iss. 1

In vacuo studies on plasma-enhanced atomic layer deposition of cobalt thin films

Reif, Johanna, Knaut, Martin, Killge, Sebastian, Winkler, Felix, Albert, Matthias, Bartha, Johann W.
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Volume:
38
Journal:
Journal of Vacuum Science & Technology A
DOI:
10.1116/1.5132891
Date:
January, 2020
File:
PDF, 3.06 MB
2020
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