Metal-Assisted Photochemical Etching of N- and Ga-Polar GaN...

Semiconductors 2019 / 12 Vol. 53; Iss. 12

Metal-Assisted Photochemical Etching of N- and Ga-Polar GaN Epitaxial Layers

Mokhov, D. V., Berezovskaya, T. N., Nikitina, E. V., Shubina, K. Yu., Mizerov, A. M., Bouravleuv, A. D.
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Volume:
53
Journal:
Semiconductors
DOI:
10.1134/s1063782619160176
Date:
December, 2019
File:
PDF, 5.46 MB
2019
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