Epitaxial Growth of Zinc Sulfide by Atomic Layer Deposition on SiC/Si Hybrid Substrates
Antipov, V. V., Kukushkin, S. A., Osipov, A. V.Volume:
45
Journal:
Technical Physics Letters
DOI:
10.1134/s1063785019110026
Date:
November, 2019
File:
PDF, 579 KB
2019