A New Silicon Quantum-Well Structure with Controlled...

Applied Physics Express 2008 / 6 Vol. 1

A New Silicon Quantum-Well Structure with Controlled Diameter and Thickness Fabricated with Ferritin Iron Core Mask and Chlorine Neutral Beam Etching

Samukawa, Seiji, Kubota, Tomohiro, Huang, Chi-Hsien, Hashimoto, Takeshi, Igarashi, Makoto, Nishioka, Kensuke, Takeguchi, Masaki, Uraoka, Yukiharu, Fuyuki, Takashi, Yamashita, Ichiro
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Volume:
1
Journal:
Applied Physics Express
DOI:
10.1143/APEX.1.074002
Date:
June, 2008
File:
PDF, 513 KB
2008
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