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Structure and properties of metal nitride films produced by ion implantation
P. I. Ignatenko, N. A. Klyakhina, M. Yu. BadekinVolume:
41
Language:
english
Pages:
6
DOI:
10.1007/s10789-005-0073-5
Date:
January, 2005
File:
PDF, 156 KB
english, 2005