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Electrical properties of films grown on W and Mo substrates by titanium ion implantation in nitrogen atmosphere
P. I. Ignatenko, M. Yu. BadekinVolume:
41
Language:
english
Pages:
4
DOI:
10.1007/s10789-005-0117-x
Date:
March, 2005
File:
PDF, 71 KB
english, 2005