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Gaseous phase monitoring during reactive sputtering of yttrium in glow discharges
V. A. Khvostikov, S. S. GrazhuleneVolume:
76
Language:
english
Pages:
7
DOI:
10.1007/s10812-010-9277-9
Date:
November, 2009
File:
PDF, 212 KB
english, 2009