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Laser-induced fluorescence monitoring of the gas phase in a glow discharge during reactive sputtering of vanadium
V. A. Khvostikov, S. S. Grazhulene, Zh. P. Burmii, V. A. MarchenkoVolume:
78
Language:
english
Pages:
7
DOI:
10.1007/s10812-011-9520-z
Date:
November, 2011
File:
PDF, 479 KB
english, 2011