A Self-regulation Mechanism of the Resist Development Process in Integrated Circuit Fabrication and its Phase-space Picture
Georgios Ch. Sirakoulis, Ioannis KarafyllidisVolume:
12
Year:
2005
Language:
english
Pages:
22
DOI:
10.1007/s10820-005-0834-0
File:
PDF, 505 KB
english, 2005