Microchannel Fabrication in Fused Quartz by Backside...

Applied Sciences 2019 / 12 Vol. 9; Iss. 24

Microchannel Fabrication in Fused Quartz by Backside Laser-Induced Plasma Ablation Using 248 nm KrF Excimer Laser

Zhao, Yu, Li, Qian, Wang, Zhengfei, Dai, Ziruo, Chen, Tao
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Volume:
9
Journal:
Applied Sciences
DOI:
10.3390/app9245320
Date:
December, 2019
File:
PDF, 4.21 MB
2019
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