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Low Temperature Silicon Nitride Deposition Using Microwave-Excited Active Nitrogen
Shibagaki, Masahiro, Horiike, Yasuhiro, Yamazaki, TakashiVolume:
17
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAPS.17S1.215
Date:
January, 1978
File:
PDF, 888 KB
1978