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Automation of Visual Inspection of LSI Photomask Patterns by Comparing Extracted Local Features of Pattern
HARA, Yasuhiko, OKAMOTO, Keiichi, HAMADA, Toshimitsu, NAKAGAWA, KiyoshiVolume:
19
Year:
1983
Journal:
Transactions of the Society of Instrument and Control Engineers
DOI:
10.9746/sicetr1965.19.903
File:
PDF, 2.16 MB
1983