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Platinum (100) Hillock Growth in Pt/Ti Electrode Stack for SrBi2Ta2O9Ferroelectric Random Access Memory
Won Woong Jung, Si Kyung Choi, Soon Yong Kweon, Seung Jin YeomVolume:
13
Language:
english
Pages:
9
DOI:
10.1007/s10832-004-5076-0
Date:
July, 2004
File:
PDF, 700 KB
english, 2004