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Development of Spin Coated Mesoporous Oxide Films for MEMS Structures
Jong-Ah Paik, Shih-Kang Fan, Hsin Chang, Chang-Jin Kim, Ming C. Wu, Bruce DunnVolume:
13
Language:
english
Pages:
6
DOI:
10.1007/s10832-004-5136-5
Date:
July, 2004
File:
PDF, 293 KB
english, 2004