Application of electron channeling contrast imaging to 3D semiconductor structures through proper detector configurations
Han, Han, Hantschel, Thomas, Strakos, Libor, Vystavel, Tomas, Baryshnikova, Marina, Mols, Yves, Kunert, Bernardette, Langer, Robert, Vandervorst, Wilfried, Caymax, MattyJournal:
Ultramicroscopy
DOI:
10.1016/j.ultramic.2019.112928
Date:
December, 2019
File:
PDF, 917 KB
2019