Resonance properties and mass sensitivity of monolithic...

Journal of Electroceramics 2006 / 12 Vol. 17; Iss. 2-4

Resonance properties and mass sensitivity of monolithic microcantilever sensors actuated by piezoelectric PZT thick film

Jae Hong Park, Tae Yun Kwon, Hyung Joon Kim, Seung Rae Kim, Dae Sung Yoon, Chae-Il Cheon, Hwan Kim, Tae Song Kim
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Volume:
17
Language:
english
Pages:
8
DOI:
10.1007/s10832-006-6290-8
Date:
December, 2006
File:
PDF, 534 KB
english, 2006
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