The Effect of the physico-chemical properties of cellulosic...

Journal of Electroceramics 2006 / 12 Vol. 17; Iss. 2-4

The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing process

Sang-Kyun Kim, Ye-Hwan Kim, Ungyu Paik, Takeo Katoh, Jea-Gun Park
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Volume:
17
Language:
english
Pages:
5
DOI:
10.1007/s10832-006-9334-1
Date:
December, 2006
File:
PDF, 330 KB
english, 2006
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