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Taking piezoelectric microsystems from the laboratory to production
H. Ræder, F. Tyholdt, W. Booij, F. Calame, N. P. Østbø, R. Bredesen, K. Prume, G. Rijnders, P. MuraltVolume:
19
Language:
english
Pages:
6
DOI:
10.1007/s10832-007-9036-3
Date:
December, 2007
File:
PDF, 213 KB
english, 2007