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Preparation of hafnium oxide thin films by sol–gel method
Z. J. Wang, T. Kumagai, H. Kokawa, M. Ichiki, R. MaedaVolume:
21
Language:
english
Pages:
4
DOI:
10.1007/s10832-007-9228-x
Date:
December, 2008
File:
PDF, 161 KB
english, 2008