Large area deposition of Pb(Zr,Ti)O3thin films for...

Journal of Electroceramics 2008 / 02 Vol. 20; Iss. 1

Large area deposition of Pb(Zr,Ti)O3thin films for piezoelectric MEMS devices

Gunnar Suchaneck, Vinay S. Vidyarthi, Marianne Reibold, Alexander Deyneka, Lubomir Jastrabik, Gerald Gerlach, Johannes Hartung
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Volume:
20
Language:
english
Pages:
4
DOI:
10.1007/s10832-007-9330-0
Date:
February, 2008
File:
PDF, 216 KB
english, 2008
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