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Chemical development of preceramic polyvinylsilazane photoresist for ceramic patterning
Yi-He Li, Kuk-Ro Yoon, Xiao-Dong Li, Dong-Pyo KimVolume:
23
Pages:
1
DOI:
10.1007/s10832-007-9359-0
Date:
October, 2009
File:
PDF, 40 KB
2009