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Piezoelectric microspeakers with high compressive ZnO film and floating electrode
SeungHwan Yi, ManSoon Yoon, SoonChul UrVolume:
23
Language:
english
Pages:
6
DOI:
10.1007/s10832-008-9438-x
Date:
October, 2009
File:
PDF, 272 KB
english, 2009