Silicon nanodot arrays patterned using diblock copolymer...

Silicon nanodot arrays patterned using diblock copolymer templates

Gil Bum Kang, Seong-Il Kim, Young Hwan Kim, Yong Tae Kim, Jung Ho Park
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Volume:
23
Language:
english
Pages:
6
DOI:
10.1007/s10832-008-9527-x
Date:
October, 2009
File:
PDF, 418 KB
english, 2009
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