Investigation of top electrode for PZT thick films based...

Journal of Electroceramics 2010 / 10 Vol. 25; Iss. 2-4

Investigation of top electrode for PZT thick films based MEMS sensors

Christian C. Hindrichsen, Thomas Pedersen, Paw T. Kristiansen, Rasmus Lou-Møller, Karsten Hansen, Erik V. Thomsen
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
25
Language:
english
Pages:
9
DOI:
10.1007/s10832-010-9606-7
Date:
October, 2010
File:
PDF, 734 KB
english, 2010
Conversion to is in progress
Conversion to is failed