Electrical and optical characterisation of aluminium...

Journal of Electroceramics 2011 / 08 Vol. 27; Iss. 1

Electrical and optical characterisation of aluminium nitride piezoelectric films on silicon nitride membranes

Didier Cornez, Jocelyn Elgoyhen, David Hutson, Cecile Percier, Perrine Plissard, Mark Begbie, Aboubacar Chaehoi, Katherine J. Kirk
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Volume:
27
Language:
english
Pages:
5
DOI:
10.1007/s10832-011-9646-7
Date:
August, 2011
File:
PDF, 365 KB
english, 2011
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