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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Micro-patterned porous silicon using proton beam writing
Breese, M. B. H., Mangaiyarkarasi, D., Teo, E. J., Bettiol, A. A., Blackwood, D.Volume:
866
Year:
2006
DOI:
10.1063/1.2401510
File:
PDF, 719 KB
2006