[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Investigation of pMOS Device Matching and Characteristics Using B[sub 18]H[sub 22] Implantation
Lee, Joonho, Choi, Jaewoong, An, Jungsoo, Ryu, Seonho, Lee, Kyung Won, Kim, Jonghoon, Ra, Geum Joo, Kim, Steve, Cho, H. T., Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy VYear:
2008
DOI:
10.1063/1.3033658
File:
PDF, 1.78 MB
2008
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