Effects of gas pressure and discharge current on beam...

Review of Scientific Instruments 2019 / 11 Vol. 90; Iss. 11

Effects of gas pressure and discharge current on beam composition in a magnetron discharge ion source

Vizir, Alexey, Oks, Efim, Shandrikov, Maxim, Zhang, Bin, Yushkov, Georgy
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
90
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5125950
Date:
November, 2019
File:
PDF, 1.56 MB
2019
Conversion to is in progress
Conversion to is failed