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Effects of gas pressure and discharge current on beam composition in a magnetron discharge ion source
Vizir, Alexey, Oks, Efim, Shandrikov, Maxim, Zhang, Bin, Yushkov, GeorgyVolume:
90
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.5125950
Date:
November, 2019
File:
PDF, 1.56 MB
2019