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AIP Conference Proceedings [AIP The fourteenth international conference on the application of accelerators in research and industry - Denton, Texas (USA) (6-9 Nov 1996)] - Plasma Source Ion Implantation research and applications at Los Alamos National Laboratory
Munson, C. P., Faehl, R. J., Henins, I., Nastasi, M., Reass, W., Rej, D. J., Scheuer, J. T., Tuszewski, M., Walter, K. C., Wood, B. P.Year:
1997
DOI:
10.1063/1.52620
File:
PDF, 716 KB
1997