Height patterning of nanostructured surfaces with a focused helium ion beam: a precise and gentle non-sputtering method
Tavares, Luciana, Chiriaev, Serguei, Adashkevich, Vadzim, Taboryski, Rafael, Rubahn, Horst-GuenterJournal:
Nanotechnology
DOI:
10.1088/1361-6528/ab6679
Date:
December, 2019
File:
PDF, 707 KB
2019